Surface inspection via projection interferometry
نویسندگان
چکیده
منابع مشابه
Interferometry for Online/In-Process Surface Inspection
Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environm...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 1988
ISSN: 0003-6935,1539-4522
DOI: 10.1364/ao.27.004626